Shikida, A. : rechercher sur Z-Library

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1

Polymer micromachining technologies for a table-shaped tactile sensor using thick sacrificial layer

Lee, Jeong Il, Shikida, Mitsuhiro, Sato, Kazuo

Journal:

Microsystem Technologies

Année:

2015

Langue:

english

Fichier:

PDF, 2.21 MB

english, 2015

2

Fabrication of a quartz tuning-fork probe with a sharp tip for AFM systems

H. Hida, M. Shikida, K. Fukuzawa, S. Murakami, Ke. Sato, K. Asaumi, Y. Iriye, Ka. Sato

Journal:

Sensors and Actuators A: Physical

Année:

2008

Langue:

english

Fichier:

PDF, 1.48 MB

english, 2008

3

Micromorphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH and TMAH

E. van Veenendaal, K. Sato, M. Shikida, J. van Suchtelen

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2001

4

Anisotropic etching rates of single-crystal silicon for TMAH water solution as a function of crystallographic orientation

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Kazuo Asaumi, Yasuroh Iriye, Masaharu Yamamoto

Journal:

Sensors and Actuators A: Physical

Année:

1999

Langue:

english

Fichier:

PDF, 1.11 MB

english, 1999

5

An electrostatic actuator for dual-axis micro-mechanical probe on friction force microscope

Hiroaki Amakawa, Kenji Fukuzawa, Mitsuhiro Shikida, Hiroaki Tsuji, Hedong Zhang, Shintaro Itoh

Journal:

Sensors and Actuators A: Physical

Année:

2012

Langue:

english

Fichier:

PDF, 1.24 MB

english, 2012

6

Determinants of trip choice, satisfaction and loyalty in an eco-tourism destination: a modelling study on the Shiretoko Peninsula, Japan

Romão, João, Neuts, Bart, Nijkamp, Peter, Shikida, Asami

Journal:

Ecological Economics

Année:

2014

Langue:

english

Fichier:

PDF, 604 KB

english, 2014

7

Market segmentation and their potential economic impacts in an ecotourism destination: An applied modelling study on Hokkaido, Japan

Neuts, B., Romao, J., Nijkamp, P., Shikida, A.

Journal:

Tourism Economics

Année:

2016

Langue:

english

Fichier:

PDF, 204 KB

english, 2016

8

Fast etching of silicon with a smooth surface in high temperature ranges near the boiling point of KOH solution

Hiroshi Tanaka, Shuichi Yamashita, Yoshitsugu Abe, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2004

Langue:

english

Fichier:

PDF, 474 KB

english, 2004

9

Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations

Di Cheng, Miguel A. Gosálvez, Tatsuya Hori, Kazuo Sato, Mitsuhiro Shikida

Journal:

Sensors and Actuators A: Physical

Année:

2006

Langue:

english

Fichier:

PDF, 778 KB

english, 2006

10

Effect of magnesium in KOH solution on the anisotropic wet etching of silicon

Hiroshi Tanaka, Di Cheng, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2007

Langue:

english

Fichier:

PDF, 926 KB

english, 2007

11

Ellipsometry study of the adsorbed surfactant thickness on Si{1 1 0} and Si{1 0 0} and the effect of pre-adsorbed surfactant layer on etching characteristics in TMAH

Bin Tang, Prem Pal, M.A. Gosalvez, M. Shikida, K. Sato, H. Amakawa, S. Itoh

Journal:

Sensors and Actuators A: Physical

Année:

2009

Langue:

english

Fichier:

PDF, 902 KB

english, 2009

12

Fabrication of monolithically integrated flow sensor on tube

M. Shikida, T. Yokota, S. Ukai, K. Sato

Journal:

Sensors and Actuators A: Physical

Année:

2010

Langue:

english

Fichier:

PDF, 1.40 MB

english, 2010

13

Surface roughness of single-crystal silicon etched by TMAH solution

Mitsuhiro Shikida, Takehiro Masuda, Daisuke Uchikawa, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 619 KB

english, 2001

14

Micro-morphology of single crystalline silicon surfaces during anisotropic wet chemical etching in KOH: velocity source forests

E. van Veenendaal, K. Sato, M. Shikida, A.J. Nijdam, J. van Suchtelen

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 544 KB

english, 2001

15

Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

Prem Pal, Kazuo Sato, Mitsuhiro Shikida, Miguel A. Gosálvez

Journal:

Sensors and Actuators A: Physical

Année:

2009

Langue:

english

Fichier:

PDF, 1.67 MB

english, 2009

16

Influence of sub-micrometer notches on the fracture of single crystal silicon thin films

X. LI, T. KASAI, S. NAKAO, T. ANDO, M. SHIKIDA, K. SATO

Journal:

Fatigue & Fracture of Engineering Materials & Structures

Année:

2007

Langue:

english

Fichier:

PDF, 553 KB

english, 2007

17

Flexible flow sensor for large-scale air-conditioning network systems

M. Shikida, K. Yoshikawa, S. Iwai, K. Sato

Journal:

Sensors and Actuators A: Physical

Année:

2012

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2012

18

Fabrication of novel microstructures based on orientation-dependent adsorption of surfactant molecules in a TMAH solution

Pal, Prem, Sato, K, Gosalvez, M A, Tang, B, Hida, H, Shikida, M

Journal:

Journal of Micromechanics and Microengineering

Année:

2011

Langue:

english

Fichier:

PDF, 505 KB

english, 2011

19

Fabrication of a bubble-driven arrayed actuator for a tactile display

Shikida, Mitsuhiro, Imamura, Tsubasa, Ukai, Shinji, Miyaji, Takaaki, Sato, Kazuo

Journal:

Journal of Micromechanics and Microengineering

Année:

2008

Langue:

english

Fichier:

PDF, 551 KB

english, 2008

20

Fabrication and flow-sensor application of flexible thermal MEMS device based on Cu on polyimide substrate

Shikida, Mitsuhiro, Niimi, Yosuke, Shibata, Shunji

Journal:

Microsystem Technologies

Année:

2017

Langue:

english

Fichier:

PDF, 2.63 MB

english, 2017

21

Design principle of micro-mechanical probe for lateral-deflection-controlled friction force microscopy

Fukuzawa, Kenji, Hamaoka, Satoshi, Shikida, Mitsuhiro, Itoh, Shintaro, Zhang, Hedong

Journal:

Microsystem Technologies

Année:

2016

Langue:

english

Fichier:

PDF, 1.86 MB

english, 2016

22

Smooth-surfaced flexible wall shear stress sensor fabricated by film transfer technology

Hasegawa, Yoshihiro, Okihara, Chiaki, Yamada, Takayuki, Komatsubara, Kai, Iwano, Koji, Sakai, Yasuhiko, Shikida, Mitsuhiro

Journal:

Sensors and Actuators A: Physical

Année:

2017

Langue:

english

Fichier:

PDF, 1.23 MB

english, 2017

23

SAE Technical Paper Series [SAE International SAE 2000 World Congress - (MAR. 06, 2000)] SAE Technical Paper Series - Development of the High Speed 2ZZ-GE Engine

Shikida, Takasuke, Nakamura, Yoshikatsu, Nakakubo, Tamio, Kawase, Hiroyuki

Année:

2000

Langue:

english

Fichier:

PDF, 516 KB

english, 2000

24

AJICAP: Affinity Peptide Mediated Regiodivergent Functionalization of Native Antibodies

Yamada, Kei, Shikida, Natsuki, Shimbo, Kazutaka, Ito, Yuji, Khedri, Zahra, Matsuda, Yutaka, Mendelsohn, Brian A.

Journal:

Angewandte Chemie International Edition

Année:

2019

Langue:

english

Fichier:

PDF, 1.62 MB

english, 2019

25

Measurement for fracture toughness of single crystal silicon film with tensile test

Xueping Li, Takashi Kasai, Shigeki Nakao, Hiroshi Tanaka, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2005

Langue:

english

Fichier:

PDF, 412 KB

english, 2005

26

Amicromachined active tactile sensor for hardness detection

Yoshihiro Hasegawa, Mitsuhiro Shikida, Takeshi Shimizu, Takaaki Miyaji, Hikaru Sasaki, Kazuo Sato, Koichi Itoigawa

Journal:

Sensors and Actuators A: Physical

Année:

2004

Langue:

english

Fichier:

PDF, 335 KB

english, 2004

27

Non-photolithographic pattern transfer for fabricating arrayed three-dimensional microstructures by chemical anisotropic etching

Mitsuhiro Shikida, Michiaki Odagaki, Nobuo Todoroki, Masaki Ando, Yuji Ishihara, Taeko Ando, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2004

Langue:

english

Fichier:

PDF, 528 KB

english, 2004

28

Anisotropy in fracture of single crystal silicon film characterized under uniaxial tensile condition

Xueping Li, Takashi Kasai, Shigeki Nakao, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato, Hiroshi Tanaka

Journal:

Sensors and Actuators A: Physical

Année:

2005

Langue:

english

Fichier:

PDF, 460 KB

english, 2005

29

Characterization of anisotropic wet etching properties of single crystal silicon: Effects of ppb-level of Cu and Pb in KOH solution

Hiroshi Tanaka, Di Cheng, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2006

Langue:

english

Fichier:

PDF, 817 KB

english, 2006

30

Patterning of polyimide and metal in deep trenches

V.G. Kutchoukov, J.R. Mollinger, M. Shikida, A. Bossche

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 361 KB

english, 2001

31

Tensile-mode fatigue testing of silicon films as structural materials for MEMS

Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2001

Langue:

english

Fichier:

PDF, 278 KB

english, 2001

32

Tensile testing system for sub-micrometer thick films

Toshiyuki Tsuchiya, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2002

Langue:

english

Fichier:

PDF, 307 KB

english, 2002

33

A model explaining mask-corner undercut phenomena in anisotropic silicon etching: a saddle point in the etching-rate diagram

Mitsuhiro Shikida, Ken-ichi Nanbara, Tohru Koizumi, Hikaru Sasaki, Michiaki Odagaki, Kazuo Sato, Masaki Ando, Shinji Furuta, Kazuo Asaumi

Journal:

Sensors and Actuators A: Physical

Année:

2002

Langue:

english

Fichier:

PDF, 362 KB

english, 2002

34

Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors

Han Ji-song, T. Kadowaki, K. Sato, M. Shikida

Journal:

Sensors and Actuators A: Physical

Année:

2002

Langue:

english

Fichier:

PDF, 809 KB

english, 2002

35

Active tactile sensor for detecting contact force and hardness of an object

Mitsuhiro Shikida, Takeshi Shimizu, Kazuo Sato, Koichi Itoigawa

Journal:

Sensors and Actuators A: Physical

Année:

2003

Langue:

english

Fichier:

PDF, 414 KB

english, 2003

36

Characterization of orientation-dependent etching properties of single-crystal silicon: effects of KOH concentration

Kazuo Sato, Mitsuhiro Shikida, Yoshihiro Matsushima, Takashi Yamashiro, Kazuo Asaumi, Yasuroh Iriye, Masaharu Yamamoto

Journal:

Sensors and Actuators A: Physical

Année:

1998

Langue:

english

Fichier:

PDF, 702 KB

english, 1998

37

Tensile testing of silicon film having different crystallographic orientations carried out on a silicon chip

Kazuo Sato, Tetsuo Yoshioka, Taeko Ando, Mitsuhiro Shikida, Tatsuo Kawabata

Journal:

Sensors and Actuators A: Physical

Année:

1998

Langue:

english

Fichier:

PDF, 590 KB

english, 1998

38

Roughening of single-crystal silicon surface etched by KOH water solution

Kazuo Sato, Mitsuhiro Shikida, Takashi Yamashiro, Masaki Tsunekawa, Shunji Ito

Journal:

Sensors and Actuators A: Physical

Année:

1999

Langue:

english

Fichier:

PDF, 5.28 MB

english, 1999

39

Differences in anisotropic etching properties of KOH and TMAH solutions

Mitsuhiro Shikida, Kazuo Sato, Kenji Tokoro, Daisuke Uchikawa

Journal:

Sensors and Actuators A: Physical

Année:

2000

Langue:

english

Fichier:

PDF, 2.63 MB

english, 2000

40

Tensile testing of SiO2 and Si3N4 films carried out on a silicon chip

Tetsuo Yoshioka, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2000

Langue:

english

Fichier:

PDF, 1002 KB

english, 2000

41

Micromechanical characterization of electroplated permalloy films for MEMS

Xueping Li, Guifu Ding, Taeko Ando, Mitsuhiro Shikida, Kazuo Sato

Journal:

Microsystem Technologies

Année:

2008

Langue:

english

Fichier:

PDF, 258 KB

english, 2008

42

Assembly of skeletal muscle cells on a Si-MEMS device and their generative force measurement

Kazunori Shimizu, Hikaru Sasaki, Hirotaka Hida, Hideaki Fujita, Kei Obinata, Mitsuhiro Shikida, Eiji Nagamori

Journal:

Biomedical Microdevices

Année:

2010

Langue:

english

Fichier:

PDF, 246 KB

english, 2010

43

Characteristics of on-wall in-tube flexible thermal flow sensor under radially asymmetric flow condition

Zhiyong Tan, Mitsuhiro Shikida, Masafumi Hirota, Yan Xing, Kazuo Sato, Takuya Iwasaki, Yasuroh Iriye

Journal:

Sensors and Actuators A: Physical

Année:

2007

Langue:

english

Fichier:

PDF, 1.64 MB

english, 2007

44

Fracture toughness measurement of thin-film silicon

T. ANDO, X. LI, S. NAKAO, T. KASAI, H. TANAKA, M. SHIKIDA, K. SATO

Journal:

Fatigue & Fracture of Engineering Materials & Structures

Année:

2005

Langue:

english

Fichier:

PDF, 225 KB

english, 2005

45

Droplet introduction into a pen-shaped portable reaction system by gravity and interfacial forces

Shikida, M., Inagaki, N., Okochi, M., Honda, H., Sato, K.

Journal:

Micro & Nano Letters

Année:

2011

Langue:

english

Fichier:

PDF, 406 KB

english, 2011

46

Orientation and transformation of flagella in electrostatic field

Washizu, M., Shikida, M., Aizawa, S.-i., Hotani, H.

Journal:

IEEE Transactions on Industry Applications

Année:

1992

Langue:

english

Fichier:

PDF, 957 KB

english, 1992

47

[IEEE 2010 IEEE 71st Vehicular Technology Conference - Taipei, Taiwan (2010.05.16-2010.05.19)] 2010 IEEE 71st Vehicular Technology Conference - Iterative Receiver Employing Multiuser Detection and Channel Estimation for MIMO-OFDM IDMA

Shikida, Jun, Suyama, Satoshi, Suzuki, Hiroshi, Fukawa, Kazuhiko

Année:

2010

Langue:

english

Fichier:

PDF, 180 KB

english, 2010

48

A MEMS flow sensor applied in a variable-air-volume unit in a building air-conditioning system

M. Shikida, Y. Yamazaki, K. Yoshikawa, Kazuo Sato

Journal:

Sensors and Actuators A: Physical

Année:

2013

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2013

49

Micromachined catheter flow sensor and its applications in breathing measurements in animal experiments

Mitsuhiro Shikida, Takaaki Shikano, Takuya Matsuyama…

Journal:

Microsystem Technologies

Année:

2014

Langue:

english

Fichier:

PDF, 878 KB

english, 2014

50

Mechanical strengthening of Si cantilevers by chemical wet etching

Mitsuhiro Shikida, Tatsuya Hasegawa, Kayo Hamaguchi, Kazuo Sato

Journal:

Microsystem Technologies

Année:

2013

Langue:

english

Fichier:

PDF, 721 KB

english, 2013